The 1S1R storage unit of 3D phase-change memory is composed of ovonic threshold switch selector (OTS) in series with the phase change memory (PCM) device. In order to solve the problems of the current OTS and PCM circuit simulation models, such as not able to accurately simulate the electrical and physical characteristics of devices, and not suitable for confined PCM, a 1S1R spice model based on Verilog-A is proposed. The model simulates the electrical characteristics of OTS and the changes of current, temperature, melting proportion, crystallization proportion and amorphous proportion in the crystallization, melting and quenching of the PCM. The model has a good convergence and fast simulation speed. The simulation results are consistent with the actual test results of the device. Compared with the traditional model, the simulation and integration of confined PCM melting process, crystal nonlinearity, melting resistivity stability and subthreshold nonlinearity, and bidirectional switching characteristics of OTS are realized. The relationship between OTS subthreshold nonlinear parameter and read voltage window is analyzed. It is found that the read window reaches its maximum when OTS threshold current is approximately equal to PCM threshold current. The results of DC simulation of 1S1R cell and transient simulation of array are displayed, providing the basis for circuit design and simulation of 3D phase-change memory.

Keywords： phase change memory (PCM); circuit simulation model; ovonic threshold switch selector; Verilog-A