著作：

韦亚一、粟雅娟、董立松、张利斌、陈睿、赵利俊，《计算光刻与版图优化》，电子工业出版社，2020

代表性论文：

1.Hua Shao, Rui Chen*, Lisong Dong, Chen Li, Qi Yan, Taian Fan, and Yayi Wei*, High Accuracy Simulation of Silicon Oxynitride Film Grown by Plasma Enhanced Chemical Vapor Deposition, IEEE Transactions on Semiconductor Manufacturing, 35(2): 309-317 (2022)

2.Hua Shao, Rui Chen*, Junjie Li, Chen Li, Qi Yan, Yayi Wei*, Modeling of SiN Inner Spacer Deposition in Gate-all-around Nanosheet FET Process, Proc. SPIE 12055, Advances in Patterning Materials and Processes XXXIX, 1205502 (2022)

3.Rui Chen, Haoru Hu, Xiaoting Li, Ying Chen, Xiaojing Su, Lisong Dong, Lei Qu, Chen Li, Jiang Yan, Yayi Wei*, Etch model based on machine learning, 2020 China Semiconductor Technology International Conference (CSTIC), 2-7 (2020).

4.Rongbo Zhao, Lisong Dong, Rui Chen, and Yayi Wei, Aberration optimization in an extreme ultraviolet lithography projector via a BP neural network and simulated annealing algorithm, Applied Optics 60 (5), 1341-1348 (2021).

5.Ying Chen, Yibo Lin, Rui Chen, Lisong Dong, Ruixuan Wu, Tianyang Gai, Le Ma, Yajuan Su, and Yayi Wei, EUV Multilayer Defect Characterization via Cycle-Consistent Learning, Optical Express, 28(12), 18493-18506 (2020).

6.Rui Chen, Granger Lobb, Aleksandra Clancy, Bradley Morgenfeld, Shyam Pal. Line End Shortening & Iso-Dense Etch Bias Improvement by ALD Spacer Shrink Process, Proc. SPIE 10146, Advances in Patterning Materials and Processes XXXIV, 101461D (2017).

7.Rui Chen, Weilu Gao, Xuan Wang, Gregory R. Aizin, John Mikalopas, Takashi Arikawa, Koichiro Tanaka, David B. Eason, Gottfried Strasser, Junichiro Kono, Jonathan P. Bird. Gunn Effect in GaAs/AlGaAs Nanoconstrictions, IEEE Transactions on Nanotechnology, 14(3): 524-530 (2015).

8.Chun Pui Kwan, Rui Chen, Uttam Singisetti, and Jonathan P. Bird. Electric-Field-Induced Conductivity Mechanisms in Crystalline Chromia, Applied Physics Letters, 106, 112901 (2015).

9.Weilu Gao, Xuan Wang, Rui Chen, David. B. Eason, Gottfried Strasser, Jonathan P. Bird and Junichiro Kono. Electroluminescence from GaAs/AlGaAs Heterostructures in Strong In-Plane Electric Fields: Evidence for k- and Real-Space Charge Transfer, ACS Photonics. 2(8): 1155-1159 (2015).

10. Rui Chen, Jungwoo Song, Teng-Yin Lin, Gregory R. Aizin, Yukio Kawano, Nobuyuki Aoki, Yuichi Ochiai, Vincent R. Whiteside, Bruce D. McCombe, David Thomas, Mike Einhorn, John L. Reno, Gottfried Strasser, and Jonathan P. Bird. Terahertz Detection With Nanoscale Semiconductor Rectifiers, IEEE Sensors Journal, 2013. 13, 24-30 (2013).