图 9  (a) LLTO表面不同锂沉积时间的Ti 2p, La 3d, O 1s谱以及Ti 2p瀑布图[70]; (b) 31 nm金属锂沉积过程中Li10GeP2S12表面的S 2p, Ge 3d和P 2p-Ge 3p谱图[53]; (c) Li2.94PO3.5N0.31的结构和磷酸盐结构中N的结合情况示意图[73,74]; (d)金属锂沉积过程中LiPON表面的O 1s, N 1s, P 2p, Li 1s和价带图[76]

Fig. 9.  (a) Ti 2p, La 3d, O 1s detail spectra and Ti 2p waterfall plot for different Li metal deposition times on LLTO surface[70]; (b) S 2p, Ge 3d, and P 2p-Ge 3p detail spectra during 31 nm Li metal deposition on Li10GeP2S12 surface[53]; (c) scheme of Li2.94PO3.5N0.31 structure and possible N configurations in phosphate structures[73,74]; (d) O 1s, N 1s, P 2p, Li 1s, and valence band spectra of LiPON surface during Li metal deposition[76].